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(Ebook) X-ray metrology in semiconductor manufacturing by D. Keith Bowen, Brian K. Tanner ISBN 9780849339288, 9781420005653, 0849339286, 1420005650

  • SKU: EBN-986866
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4.8

28 reviews
Instant download (eBook) X-ray metrology in semiconductor manufacturing after payment.
Authors:D. Keith Bowen, Brian K. Tanner
Pages:273 pages.
Year:2006
Editon:1
Publisher:CRC/Taylor & Francis
Language:english
File Size:10.48 MB
Format:pdf
ISBNS:9780849339288, 9781420005653, 0849339286, 1420005650
Categories: Ebooks

Product desciption

(Ebook) X-ray metrology in semiconductor manufacturing by D. Keith Bowen, Brian K. Tanner ISBN 9780849339288, 9781420005653, 0849339286, 1420005650

Written by established world experts, X-Ray Metrology in Semiconductor Manufacturing describes the applications, science, and technology of this rapidly evolving area. This book emphasizes practical metrology, with real world examples from the semiconductor and magnetics industries. The authors discuss the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. The book covers the essential metrological questions of precision and repeatability, absolute accuracy, spot size, and throughput for each type of measurement. This text contains important information for electrical engineers, fabrication engineers, and semiconductor engineers.
*Free conversion of into popular formats such as PDF, DOCX, DOC, AZW, EPUB, and MOBI after payment.

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