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(Ebook) Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers by Imin Kao, Chunhui Chung ISBN 9780470061213, 0470061219

  • SKU: EBN-24155644
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Instant download (eBook) Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers after payment.
Authors:Imin Kao, Chunhui Chung
Pages:304 pages.
Year:2021
Editon:1
Publisher:Wiley
Language:english
File Size:12.09 MB
Format:pdf
ISBNS:9780470061213, 0470061219
Categories: Ebooks

Product desciption

(Ebook) Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers by Imin Kao, Chunhui Chung ISBN 9780470061213, 0470061219

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques.  The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
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