logo
Product categories

EbookNice.com

Most ebook files are in PDF format, so you can easily read them using various software such as Foxit Reader or directly on the Google Chrome browser.
Some ebook files are released by publishers in other formats such as .awz, .mobi, .epub, .fb2, etc. You may need to install specific software to read these formats on mobile/PC, such as Calibre.

Please read the tutorial at this link.  https://ebooknice.com/page/post?id=faq


We offer FREE conversion to the popular formats you request; however, this may take some time. Therefore, right after payment, please email us, and we will try to provide the service as quickly as possible.


For some exceptional file formats or broken links (if any), please refrain from opening any disputes. Instead, email us first, and we will try to assist within a maximum of 6 hours.

EbookNice Team

(Ebook) Tribology In Chemical-Mechanical Planarization by Hong Liang David Craven ISBN 9780824725679, 9781420028393, 0824725670, 1420028391

  • SKU: EBN-1655216
Zoomable Image
$ 32 $ 40 (-20%)

Status:

Available

4.4

28 reviews
Instant download (eBook) Tribology In Chemical-Mechanical Planarization after payment.
Authors:Hong Liang David Craven
Pages:200 pages.
Year:2005
Editon:1
Language:english
File Size:4.17 MB
Format:pdf
ISBNS:9780824725679, 9781420028393, 0824725670, 1420028391
Categories: Ebooks

Product desciption

(Ebook) Tribology In Chemical-Mechanical Planarization by Hong Liang David Craven ISBN 9780824725679, 9781420028393, 0824725670, 1420028391

The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization (CMP) technology, particularly when applied to nanosurfaces. Tribology in Chemical-Mechanical Planarization presents a detailed account of the CMP process in a language that is suitable for tribology professionals as well as chemists, materials scientists, physicists, and other applied scientists and engineers in fields of semiconductors and microelectronics. The first half of the book is devoted to CMP, while the other focuses on the fundamentals of tribology.As the first source to integrate CMP and tribology, the book illustrates the important role that these fields play in manufacturing and technological development. It follows with an examination of tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects. Other topics covered in depth include basics of friction, flash temperature, lubrication fundamentals, basics of wear, polishing particles, and pad wear. The book concludes its focus with CMP practices, discussing mechanical aspects, pad materials, elastic modulus, and cell buckling.Expanding upon the science and technology of tribology to improve the reliability, maintenance, and wear of technical equipment and other material applications, Tribology in Chemical-Mechanical Planarization provides scientists and engineers with clear foresight to the future of this technology.
*Free conversion of into popular formats such as PDF, DOCX, DOC, AZW, EPUB, and MOBI after payment.

Related Products