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(Ebook) Spectroscopic Ellipsometry: Principles and Applications by Hiroyuki Fujiwara ISBN 9780470016084, 9780470060186, 0470016086, 0470060182

  • SKU: EBN-2031564
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4.7

24 reviews
Instant download (eBook) Spectroscopic Ellipsometry: Principles and Applications after payment.
Authors:Hiroyuki Fujiwara
Pages:388 pages.
Year:2007
Editon:1
Publisher:Wiley
Language:english
File Size:4.01 MB
Format:pdf
ISBNS:9780470016084, 9780470060186, 0470016086, 0470060182
Categories: Ebooks

Product desciption

(Ebook) Spectroscopic Ellipsometry: Principles and Applications by Hiroyuki Fujiwara ISBN 9780470016084, 9780470060186, 0470016086, 0470060182

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
*Free conversion of into popular formats such as PDF, DOCX, DOC, AZW, EPUB, and MOBI after payment.

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