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(Ebook) Silicon carbide microelectromechanical systems for harsh environments by Rebecca Cheung ISBN 9781860946240, 1860946240

  • SKU: EBN-1188738
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Instant download (eBook) Silicon carbide microelectromechanical systems for harsh environments after payment.
Authors:Rebecca Cheung
Pages:193 pages.
Year:2006
Editon:illustrated edition
Publisher:Imperial College Press; Distributed by World Scientific Pub
Language:english
File Size:8.68 MB
Format:pdf
ISBNS:9781860946240, 1860946240
Categories: Ebooks

Product desciption

(Ebook) Silicon carbide microelectromechanical systems for harsh environments by Rebecca Cheung ISBN 9781860946240, 1860946240

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.
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