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(Ebook) Run-to-run control in semiconductor manufacturing by James Moyne, Enrique del Castillo, Arnon M. Hurwitz ISBN 9780849311789, 0849311780

  • SKU: EBN-1188608
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Authors:James Moyne, Enrique del Castillo, Arnon M. Hurwitz
Pages:333 pages.
Year:2001
Editon:1
Publisher:CRC Press
Language:english
File Size:9.13 MB
Format:pdf
ISBNS:9780849311789, 0849311780
Categories: Ebooks

Product desciption

(Ebook) Run-to-run control in semiconductor manufacturing by James Moyne, Enrique del Castillo, Arnon M. Hurwitz ISBN 9780849311789, 0849311780

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
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