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(Ebook) MEMS Mechanical Sensors by Stephen Beeby ISBN 9781580535366, 1580535364

  • SKU: EBN-34616982
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Authors:Stephen Beeby
Pages:269 pages.
Year:2004
Editon:illustrated edition
Publisher:Artech House
Language:english
File Size:4.06 MB
Format:pdf
ISBNS:9781580535366, 1580535364
Categories: Ebooks

Product desciption

(Ebook) MEMS Mechanical Sensors by Stephen Beeby ISBN 9781580535366, 1580535364

Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.
*Free conversion of into popular formats such as PDF, DOCX, DOC, AZW, EPUB, and MOBI after payment.

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