(Ebook) MEMS and NEMS Systems Devices and Structures 1st Edition by Sergey Edward Lyshevski ISBN 0849312620 9780849312625

(Ebook) MEMS and NEMS Systems Devices and Structures 1st Edition by Sergey Edward Lyshevski ISBN 0849312620 9780849312625

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ISBN 10: 0849312620 
ISBN 13: 9780849312625
Author: Sergey Edward Lyshevski

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

(Ebook) MEMS and NEMS Systems Devices and Structures 1st Table of contents:

1 Overview and Introduction
2 New Trends in Engineering and Science: Micro- and Nanoscale Systems
2.1 Introduction to Design of MEMS and NEMS
2.2 Biological and Biosystems Analogies
2.3 Overview of Nano- and Microelectromechanical Systems
2.4 Applications of Micro- and Nanoelectromechanical Systems
2.5 Micro- and Nanoelectromechanical Systems
2.5.1 Microelectromechanical Systems, Devices, and Structures Definitions
2.5.2 Microfabrication: Introduction
2.6 Synergetic Paradigms in MEMS
2.7 MEMS and NEMS Architectures
References
3 Fundamentals of MEMS Fabrication
3.1 Introduction and Description of Basic Processes
3.2 Microfabrication and Micromachining of ICs, Microstructures, and Microdevices
3.3 MEMS Fabrication Technologies
3.3.1 Bulk Micromachining
3.3.2 Surface Micromachining
3.3.3 High-Aspect-Ratio (LIGA and LIGA-Like) Technology
References
4 Devising and Synthesis of MEMS and NEMS
4.1 MEMS Motion Microdevices Classifier and Synthesis
4.1.1 Microelectromechanical Microdevices
4.1.2 Synthesis and Classification Solver
4.2 Nanoelectromechanical Systems
References
5 Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures
5.1 Introduction to Modeling, Analysis, and Simulation
5.2 Electromagnetics and Its Application for MEMS and NEMS
5.2.1 Basic Foundations in Model Developments of Micro- and Nanoactuators in Electromagnetic Fields
5.2.2 Lumped-Parameter Mathematical Models of MEMS
5.2.3 Direct-Current Microtransducers
5.3 Induction Micromachines
5.3.1 Two-Phase Induction Micromotors
5.3.2 Three-Phase Induction Micromotors
5.4 Synchronous Microtransducers
5.4.1 Single-Phase Reluctance Micromotors
5.4.2 Permanent-Magnet Synchronous Microtransducers
5.5 Microscale Permanent-Magnet Stepper Micromotors
5.5.1 Mathematical Model in the Machine Variables
5.5.2 Mathematical Models of Permanent-Magnet Stepper Micromotors in the Rotor and Synchronous Reference Frames
5.6 Piezotransducers
5.6.1 Piezotransducers: Steady-State Models and Characteristics
5.6.2 Mathematical Models of Piezoactuators: Dynamics and Nonlinear Equations of Motion
5.7 Fundamentals of Modeling of Electromagnetic Radiating Energy Microdevices
5.8 Classical Mechanics and Its Application
5.8.1 Newtonian Mechanics
5.8.2 Lagrange Equations of Motion
5.8.3 Hamilton Equations of Motion
5.9 Thermoanalysis and Heat Equation
6 Nanosystems, Quantum Mechanics, and Mathematical Models
6.1 Atomic Structures and Quantum Mechanics
6.2 Molecular and Nanostructure Dynamics
6.2.1 Schrödinger Equation and Wavefunction Theory
6.2.2 Density Functional Theory
6.2.3 Nanostructures and Molecular Dynamics
6.2.4 Electromagnetic Fields and Their Quantization
6.3 Molecular Wires and Molecular Circuits
References
7 Control of Microelectromechanical Systems
7.1 Introduction to Microelectromechanical Systems Control
7.2 Lyapunov Stability Theory
7.3 Control of Microelectromechanical Systems
7.3.1 Proportional-Integral-Derivative Controllers
7.3.2 Tracking Control
7.3.3 Time-Optimal Control
7.3.4 Sliding Mode Control
7.3.5 Constrained Control of Nonlinear MEMS: Hamilton-Jacobi Method
7.3.6 Constrained Control of Nonlinear Uncertain MEMS: Lyapunov Method
7.4 Intelligent Control of MEMS
7.5 Hamilton-Jacobi Theory and Quantum Mechanics
References
8 Case Studies: Synthesis, Analysis, Fabrication, and Computer- Aided-Design of MEMS
8.1 Introduction
8.2 Design and Fabrication
8.3 Analysis of Translational Microtransducers
8.4 Single-Phase Reluctance Micromotors: Modeling, Analysis, and Control
8.5 Three-Phase Synchronous Reluctance Micromotors
8.6 Microfabrication
8.6.1 Microcoils/Microwindings Fabrication Through the Copper, Nickel and Aluminum Electrodeposition
8.6.2 Nix%Fe100-x% Thin Films Electrodeposition
8.6.3 NiFeMo and NiCo Thin Films Electrodeposition
8.6.4 Micromachined Polymer Magnets
8.6.5 Planarization
8.7 Magnetization Dynamics of Thin Films
8.8 Microstructures and Microtransducers With Permanent Magnets: Micromirror Actuators
8.9 Reluctance Electromagnetic Micromotors
8.10 Micromachined Polycrystalline Silicon Carbide Micromotors
8.11 Axial Electromagnetic Micromotors
8.12 Synergetic Computer-Aided Design of MEMS

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Tags: Sergey Edward Lyshevski, NEMS, Systems