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(Ebook) Low-K Nanoporous Interdielectrics: Materials, Thin Film Fabrications, Structures and Properties : Materials, Thin Film Fabrications, Structures and Properties by Moonhor Ree; Jinhwan Yoo; Kyuyoung Heo ISBN 9781617283185, 1617283185

  • SKU: EBN-51360748
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Instant download (eBook) Low-K Nanoporous Interdielectrics: Materials, Thin Film Fabrications, Structures and Properties : Materials, Thin Film Fabrications, Structures and Properties after payment.
Authors:Moonhor Ree; Jinhwan Yoo; Kyuyoung Heo
Pages:77 pages.
Year:2010
Editon:1
Publisher:Nova Science Publishers, Incorporated
Language:english
File Size:2.1 MB
Format:pdf
ISBNS:9781617283185, 1617283185
Categories: Ebooks

Product desciption

(Ebook) Low-K Nanoporous Interdielectrics: Materials, Thin Film Fabrications, Structures and Properties : Materials, Thin Film Fabrications, Structures and Properties by Moonhor Ree; Jinhwan Yoo; Kyuyoung Heo ISBN 9781617283185, 1617283185

The use of low dielectric constant (low-k) interdielectrics in multilevel structure integrated circuits (ICs) can lower line-to-line noise in interconnects and alleviate power dissipation issues by reducing the capacitance between the interconnect conductor lines. Because of these merits, low-k interdielectric materials are currently in high demand in the development of advanced ICs. One important approach to obtaining low-k values is the incorporation of nanopores into dielectrics. This book provides an overview of the methodologies and characterization techniques used for investigating low-k nanoporous interdielectrics.
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