(Ebook) Interlayer Dielectrics for Semiconductor Technologies by S.P. Murarka, M. Eizenberg and A.K. Sinha (Eds.) ISBN 9780125112215, 0125112211

(Ebook) Interlayer Dielectrics for Semiconductor Technologies by S.P. Murarka, M. Eizenberg and A.K. Sinha (Eds.) ISBN 9780125112215, 0125112211

Content: Preface, Pages v-vii, S.P. Murarka, M. Eizenberg, A.K. SinhaAcknowledgements, Page ixList of Contributors, Pages xi-xiiChapter 1 - Introduction: Interlayer dielectrics in microelectronic devices, Pages 1-6, M. EizenbergChapter 2 - Dielectric properties, Pages 7-36, S.P. MurarkaChapter 3 - Characterization of low dielectric constant materials, Pages 37-76, P.S. Ho, J. Liu, M. Morgen, M. Kiene, J.-H. Zhao, C. HuChapter 4 - Compatibilities of dielectric films, Pages 77-119, C.K. Goldberg, V.S. WangChapter 5 - Silicon-based dielectrics, Pages 121-156, C. Leung, E. OngChapter 6 - Low-κ polymers, Pages 157-199, S.P. MurarkaChapter 7 - Chemical vapor deposition of C-F low-k materials, Pages 201-225, M. Uhlig, T. GessnerChapter 8 - Spin-on Si-based low-k materials, Pages 227-259, S.E. Schulz, T. GessnerChapter 9 - Nanoporous dielectric films: Fundamental property relations and microelectronics applications, Pages 261-325, J.L. Plawsky, W.N. Gill, A. Jain, S. RogojevicChapter 10 - High-k dielectrics grown by atomic layer deposition: Capacitor and gate applications, Pages 327-348, M.D. Groner, S.M. GeorgeChapter 11 - Dielectric materials in optical waveguide aplications, Pages 349-389, P.D. Persans, F. Huang, N. Agarwal, S. Ponoth, J.L. PlawskyChapter 12 - Reliability, Pages 391-407, S.P. MurarkaChapter 13 - Future trends in silicon technologies, Pages 409-427, E. Ong, A. SinhaIndex, Pages 429-444