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(Ebook) Field Guide to Optical Lithography by Chris A. Mack ISBN 9780819462077, 0819462071

  • SKU: EBN-4770136
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Instant download (eBook) Field Guide to Optical Lithography after payment.
Authors:Chris A. Mack
Pages:136 pages.
Year:2006
Editon:Spi
Publisher:SPIE Publications
Language:english
File Size:3.3 MB
Format:pdf
ISBNS:9780819462077, 0819462071
Categories: Ebooks

Product desciption

(Ebook) Field Guide to Optical Lithography by Chris A. Mack ISBN 9780819462077, 0819462071

The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry. Contents - Symbol Glossary - The Lithgraphy Process - Image Formation - Imaging into a Photoresist - Photoresist Chemistry - Lithography Control and Optimization - Equation Summary - Glossary - Index
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