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(Ebook) Electroceramic-Based MEMS:Fabrication-Technology and Applications by N. Setter ISBN 9780387233109, 9780387233192, 0387233105, 0387233199

  • SKU: EBN-1895110
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Authors:N. Setter
Pages:426 pages.
Year:2005
Editon:1
Language:english
File Size:5.86 MB
Format:pdf
ISBNS:9780387233109, 9780387233192, 0387233105, 0387233199
Categories: Ebooks

Product desciption

(Ebook) Electroceramic-Based MEMS:Fabrication-Technology and Applications by N. Setter ISBN 9780387233109, 9780387233192, 0387233105, 0387233199

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.
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